A swing-arm on-machine inspection method for profile measurement of large optical surface in lapping process

✍ Scribed by In Kyoung Sung; Chang Jin Oh; Eung Suk Lee; Ock Hyun Kim

• Publisher: Springer-Verlag
• Year: 2005
• Tongue: English
• Weight: 520 KB
• Volume: 19
• Category: Article
• ISSN: 1738-494X
• DOI: 10.1007/bf03023935