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Surface Kinetics in Copper CVD

✍ Scribed by M. L. H. ter Heerdt; P. J. van der Put; J. Schoonman

Publisher: John Wiley and Sons
Year: 2001
Tongue: English
Weight: 313 KB
Volume: 7
Category: Article
ISSN: 0948-1907
DOI: 10.1002/1521-3862(200109)7:5<199::aid-cvde199>3.0.co;2-z

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