✦ LIBER ✦

Surface gettering of background impurities and defects in GaAs wafers

✍ Scribed by L. S. Vlasenko; A. T. Gorelenok; V. V. Emtsev; A. V. Kamanin; D. S. Poloskin; N. M. Shmidt

Book ID: 110126170
Publisher: Springer
Year: 2001
Tongue: English
Weight: 55 KB
Volume: 35
Category: Article
ISSN: 1063-7826
DOI: 10.1134/1.1349927

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Surface Gettering Background Impurities

Surface Gettering Background Impurities and Defects in GaAs Plates

✍ Shmidt, N.; Gorelenok, A.T.; Emtsev, Valentin V.; Kamanin, Alex A.; Markov, A.V. 📂 Article 📅 1999 🏛 Trans Tech Publications, Ltd. 🌐 English ⚖ 371 KB

Distribution of defects and impurities i

Distribution of defects and impurities in gallium arsenide wafers after surface gettering

✍ A.T Gorelenok; V.F Andrievskii; A.V Kamanin; S.I Kohanovskii; N.M Shmidt 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 309 KB

Peculiarities of defect and impurity beh

Peculiarities of defect and impurity behaviour in gallium arsenide during surface gettering

✍ Gorelenok, A T; Andrievskii, V F; Kamanin, A V; Kokhanovskii, S I; Mezdrogina, M 📂 Article 📅 2002 🏛 Institute of Physics 🌐 English ⚖ 120 KB

Back surface gettering of Au in GaAs

✍ Magge, T. J. ;Peng, J. ;Hong, J. D. ;Katz, W. ;Evans, C. A. 📂 Article 📅 1979 🏛 John Wiley and Sons 🌐 English ⚖ 615 KB

Influence of extended defects and native

Influence of extended defects and native impurities on external gettering in polycrystalline silicon

✍ E. Ehret; V. Allais; J.-P. Vallard; A. Laugier 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 927 KB

Gettering or generation of the EL2 defec

Gettering or generation of the EL2 defects at dislocations in GaAs?

✍ Figielski, T. ;Wosinski, T. ;Makosa, A. 📂 Article 📅 1992 🏛 John Wiley and Sons 🌐 English ⚖ 834 KB