Surface Figure Metrology for X-Ray Optics: Estler, W. T.; Evans, C. J. Topical Meeting on Soft-X-Ray Projection Lithography; 1991 Apr 10; Monterey, CA.: OSA; 1992 May 22: 145–146. Vol. 12

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 155 KB
• Volume: 15
• Category: Article
• ISSN: 0141-6359
• DOI: 10.1016/0141-6359(93)90337-a