Angstrom-Level Noncontact Profiling of Mirrors for Soft X-Ray Lithography: Glenn, P. Proceedings of the Topical Meeting on Soft-X-Ray Projection Lithography, 1991 Apr 10; Monterey, Ca.; OSA; 1992 May 22: 134–136. Vol. 12

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 160 KB
• Volume: 15
• Category: Article
• ISSN: 0141-6359
• DOI: 10.1016/0141-6359(93)90293-j