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Surface damages on single-crystal silicon during irradiation by a powerful ion beam

✍ Scribed by V. S. Kovivchak; T. V. Panova; O. V. Krivozubov; N. A. Davletkil’deev; E. V. Knyazev

Book ID
114991068
Publisher
Pleiades Publishing
Year
2012
Tongue
English
Weight
1018 KB
Volume
6
Category
Article
ISSN
1027-4510

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✍ H. Bender; W. D. Chen 📂 Article 📅 1990 🏛 John Wiley and Sons 🌐 English ⚖ 877 KB

## Abstract Damage and recovery induced by electron and ion beam irradiation during AES analysis of silicon nitride and oxynitrides are discussed. The results show that after prolonged electron beam irradiation, a damage peak is induced in the Si LVV spectrum. The initial incubation time decreases