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Surface compositional and chemical-state changes of SiC, Si3N4 and SiO2 by energetic hydrogens

✍ Scribed by T.A. Sasaki; Y. Baba

Book ID: 107810050
Publisher: Elsevier Science
Year: 1986
Tongue: English
Weight: 305 KB
Volume: 138
Category: Article
ISSN: 0022-3115
DOI: 10.1016/0022-3115(86)90269-2

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