✦ LIBER ✦

Growth of polycrystalline SiC films on SiO2 and Si3N4 by APCVD

✍ Scribed by Chien Hung Wu; Christian A. Zorman; Mehran Mehregany

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Growth and characterization of ZnO films

✍ B.S. Panwar; A.B. Bhattacharyya; K.C. Nagpal; R.P. Mall 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 798 KB

Effect of gas phase on SiC and Si3N4form

✍ H. Wada; L. Wang 📂 Article 📅 1992 🏛 Springer 🌐 English ⚖ 715 KB

Annealing studies of coupled Si3N4and Si

✍ H. Du; R. E. Tressler; K. E. Spear; M. Wang 📂 Article 📅 1989 🏛 Springer 🌐 English ⚖ 249 KB

Optical thickness measurement of SiO2Si

✍ F. Reizman; W. van Gelder 📂 Article 📅 1967 🏛 Elsevier Science 🌐 English ⚖ 666 KB

Properties of SiC, Si3N4 and SiO2 cerami

✍ Y. Kanno 📂 Article 📅 1985 🏛 Elsevier Science 🌐 English ⚖ 492 KB

Raman scattering studies of polycrystall

✍ Junho Jeong; Kiwan Jang; Ho Sueb Lee; Gwiy-Sang Chung; Gwi-yeol Kim 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 519 KB