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Surface composition analysis of HF vapour cleaned silicon by X-ray photoelectron spectroscopy

✍ Scribed by A. Ermolieff; F. Martin; A. Amouroux; S. Marthon; J.F.M. Westendorp

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 362 KB
Volume: 48-49
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(91)90327-g

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