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Surface characteristics and nanoindentation study of Ni–Mn–Ga ferromagnetic shape memory sputtered thin films

✍ Scribed by C. Liu; Z.Y. Gao; X. An; H.B. Wang; L.X. Gao; W. Cai


Book ID
108060406
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
795 KB
Volume
254
Category
Article
ISSN
0169-4332

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Ni-Mn-Ga thin films have been fabricated by using magnetron sputtering technique under various substrate negative bias voltages. The effect of substrate negative bias voltage on the compositions and surface morphology of Ni-Mn-Ga thin films was systematically investigated by energy dispersive X-ray