✦ LIBER ✦

Surface and nanomechanical properties of Si:C:H films prepared by RF plasma beam CVD

✍ Scribed by Tóth, A.; Mohai, M.; Ujvári, T.; Bertóti, I.

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Tribological properties of a-C:H films o

✍ Wazumi, Koichiro; Koga, Yoshinori; Tanaka, Akihiro 📂 Article 📅 2003 🏛 Elsevier Science 🌐 English ⚖ 715 KB

Preparation and properties of amorphous

✍ Meneve, J.; Dekempeneer, E.; Jacobs, R.; Eersels, L.; Van Den Bergh, V.; Smeets, 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 525 KB

Microstructures of hydrogenated amorphou

✍ Hideki Shimizu; Setsuo Nakao; Hiroshi Kusakabe; Mikio Noda 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 219 KB

Mechanical properties of SiNxCxceramic f

✍ M. Moriyama; K. Kamata; I. Tanabe 📂 Article 📅 1991 🏛 Springer 🌐 English ⚖ 706 KB

Influence of substrate bias on the prope

✍ S. Xu; M. Hundhausen; J. Ristein; B. Yan; L. Ley 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 275 KB

Structure and properties of a-Si1−xGex:H

✍ M. Wakagi; M. Chigasaki; K. Tamahashi; T. Ohno; M. Naruse; M. Hanazono; E. Maruy 📂 Article 📅 1985 🏛 Elsevier Science 🌐 English ⚖ 163 KB