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Surface activation using remote plasma for silicon to quartz wafer bonding

✍ Scribed by R. E. Belford; S. Sood

Book ID: 106185596
Publisher: Springer-Verlag
Year: 2008
Tongue: English
Weight: 323 KB
Volume: 15
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s00542-008-0710-4

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