✦ LIBER ✦

Surface-acoustic-wave film thickness monitor

Publisher: Elsevier Science
Year: 1978
Tongue: English
Weight: 158 KB
Volume: 28
Category: Article
ISSN: 0042-207X
DOI: 10.1016/s0042-207x(78)80667-8

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✦ Synopsis

resolved by taking into account the differences concerning the film orientations. (Germany)

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