Suppression of random dopant-induced threshold voltage fluctuations in sub-0.1-μm MOSFET's with epitaxial and δ-doped channels

✍ Scribed by Asenov, A.; Saini, S.

• Book ID: 114537823
• Publisher: IEEE
• Year: 1999
• Tongue: English
• Weight: 272 KB
• Volume: 46
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/16.777162