Suppression of carbon depletion from carbon-doped low-k dielectric layers during fluorocarbon based plasma etching

✍ Scribed by I. Reid; V. Krastev; G. Hughes

• Book ID: 104050601
• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 196 KB
• Volume: 83
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2006.05.009