✦ LIBER ✦
Thickness of a modified surface layer formed in a silsesquioxane-based low-k material during etching in a fluorocarbon plasma
✍ Scribed by Sung-Wook Hwang; Gyeo-Re Lee; Jae-Ho Min; Sang Heup Moon
- Book ID
- 110643716
- Publisher
- Springer US
- Year
- 2003
- Tongue
- English
- Weight
- 158 KB
- Volume
- 20
- Category
- Article
- ISSN
- 0256-1115
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