RF and DC characteristics in Al2O3/Si3N4
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Maeda, Narihiko ;Makimura, Takashi ;Maruyama, Takashi ;Wang, Chengxin ;Hiroki, M
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Article
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2006
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John Wiley and Sons
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English
β 224 KB
## Abstract Al~2~O~3~/Si~3~N~4~ insulatedβgate AlGaN/GaN heterostructure fieldβeffect transistors (HFETs) have been fabricated, where the regrown ohmic structure was incorporated to reduce the contact resistance. Excellent DC and RF characteristics have been obtained together with the low gate leak