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Superior suppression of gate current leakage in Al2O3/Si3N4bilayer-based AlGaN/GaN insulated gate heterostructure field-effect transistors

✍ Scribed by C. X. Wang; N. Maeda; M. Hiroki; T. Tawara; T. Makimoto; T. Kobayahsi; T. Enoki


Book ID
107453403
Publisher
Springer US
Year
2005
Tongue
English
Weight
123 KB
Volume
34
Category
Article
ISSN
0361-5235

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RF and DC characteristics in Al2O3/Si3N4
✍ Maeda, Narihiko ;Makimura, Takashi ;Maruyama, Takashi ;Wang, Chengxin ;Hiroki, M πŸ“‚ Article πŸ“… 2006 πŸ› John Wiley and Sons 🌐 English βš– 224 KB

## Abstract Al~2~O~3~/Si~3~N~4~ insulated‐gate AlGaN/GaN heterostructure field‐effect transistors (HFETs) have been fabricated, where the regrown ohmic structure was incorporated to reduce the contact resistance. Excellent DC and RF characteristics have been obtained together with the low gate leak