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Superhard coatings of CNx/ZrN multilayers prepared by DC magnetron sputtering

โœ Scribed by Mei-Ling Wu; Wei-Da Qian; Yip-Wah Chung; Yun-Yu Wang; Ming-Show Wong; William D Sproul


Book ID
114086201
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
441 KB
Volume
308-309
Category
Article
ISSN
0040-6090

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Silicon carbide (SiC) is becoming one of the most important electronic materials in recent years. Single crystalline SiC is a widebandgap semiconductor, which finds a wide range of applications in high temperature, power consuming, and fast-acting electron devices. Common methods applied for silicon