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Characterisation of zirconium nitride coatings prepared by DC magnetron sputtering

✍ Scribed by J.V. Ramana; Sanjiv Kumar; Christopher David; A.K. Ray; V.S. Raju


Book ID
117358897
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
52 KB
Volume
43
Category
Article
ISSN
0167-577X

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## Carbon-containing tungsten coatings were deposited by magnetron sputtering onto AISI 316 stainless steel substrates in A&H, gas mixtures. Optical emission spectroscopy was used to control the C,H, gas flow. The goal of this investigation was to study the influence of the carbon content in W,_,C,