A dry-etch resistant positive-working el
✍
E. D. Roberts
📂
Article
📅
1983
🏛
Society for Plastic Engineers
🌐
English
⚖ 783 KB
## Abstract This paper describes two types of cross‐linked positive‐working electron resists. The first is based upon phenol‐formaldehyde resins crosslinked to poly‐(methyl methacrylate) by phenolic ester groups. The second type is based upon polystyrene, crosslinked by carboxylic acid anhydride gr