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Successive segregation in laser-crystallized poly-SiGe thin films

✍ Scribed by M. Weizman; N.H. Nickel; I. Sieber; B. Yan

Book ID
116668930
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
115 KB
Volume
352
Category
Article
ISSN
0022-3093

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## Abstract The defect properties of laser‐crystallized polycrystalline silicon–germanium (Si–Ge) thin films on glass substrates were investigated with electron spin resonance (ESR) and conductivity measurements. The ESR measurements reveal that laser‐crystallized poly Si~1βˆ’__x__~Ge~__x__~ thin fil