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Substrate temperature influence on W/WCNx bilayers grown by pulsed vacuum arc discharge

โœ Scribed by R. Ospina; D. Escobar; E. Restrepo-Parra; P.J. Arango; J.F. Jurado


Book ID
116245068
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
576 KB
Volume
258
Category
Article
ISSN
0169-4332

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