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Substrate surface effect on the laser-induced plasma characteristics for thin film deposition

โœ Scribed by M.R. Predtechensky; A.V. Bulgakov; A.P. Mayorov; A.V. Roshchin


Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
660 KB
Volume
1
Category
Article
ISSN
0964-1807

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Cold remote nitrogen plasma effects on p
โœ C. Jama; P. Goudmand ๐Ÿ“‚ Article ๐Ÿ“… 1998 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 354 KB

Carbon nitride films were deposited by ablation of carbon molecular fragments from a graphite targets on a silicon substrate after few pulses of a localized transversely excited atmospheric pressure CO2 laser. Deposition media were either a non excited nitrogen flow or cold remote plasma of nitrogen