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Substrate bias effect on Al–Si and Al–Ge thin film structure

✍ Scribed by Ryoko Horie; Nobuhiro Yasui; Yoshihiro Ohashi; Tohru Den


Book ID
108290065
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
783 KB
Volume
516
Category
Article
ISSN
0040-6090

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