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Submicron highly doped Si layers grown by LPVPE

✍ Scribed by L. Vescan; H. Beneking; O. Meyer

Publisher: Elsevier Science
Year: 1986
Tongue: English
Weight: 527 KB
Volume: 76
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(86)90009-6

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