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Submicrometre-pitch intercomparison between optical diffraction, scanning electron microscope and atomic force microscope

✍ Scribed by Misumi, Ichiko; Gonda, Satoshi; Kurosawa, Tomizo; Tanimura, Yoshihisa; Ochiai, Naofumi; Kitta, Jun-ichiro; Kubota, Fumio; Yamada, Mitsuhiko; Fujiwara, Yoshinobu; Nakayama, Yoshinori; Takamasu, Kiyoshi

Book ID: 124062444
Publisher: Institute of Physics
Year: 2003
Tongue: English
Weight: 243 KB
Volume: 14
Category: Article
ISSN: 0957-0233
DOI: 10.1088/0957-0233/14/12/004

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