TiW silicide-gate technology for self-al
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SS Gill; GJ Pryce; J Woodward
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Article
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1985
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Elsevier Science
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Royal Signals and Radar Establishment, St Andrews Road, Malvern, Worcs, UK A range of sputtered titanium-tungsten silicide compositions have been formed by two different approaches. The most successful has been the annealing of Ti0.3W0.7/Si multilayers to form a Ti0.3W0.7Si0.33 film. This contact ha