𝔖 Bobbio Scriptorium

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Sub - 35 nm metal gratings fabricated using PMMA with high contrast developers

✍ Scribed by S. Thoms; D.S. Macintyre; M. McCarthy

Book ID: 114155773
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 264 KB
Volume: 41-42
Category: Article
ISSN: 0167-9317
DOI: 10.1016/s0167-9317(98)00047-1

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