SU-8: promising resist for advanced direct LIGA applications for high aspect ratio mechanical microparts

✍ Scribed by J. Kouba; R. Engelke; M. Bednarzik; G. Ahrens; Heinz-Ulrich Scheunemann; G. Gruetzner; B. Loechel; H. Miller; D. Haase

• Publisher: Springer-Verlag
• Year: 2006
• Tongue: English
• Weight: 449 KB
• Volume: 13
• Category: Article
• ISSN: 0946-7076
• DOI: 10.1007/s00542-006-0178-z