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Study on transmittance spectra of ITO thin films by ellipsometric method

✍ Scribed by ZhaoQi Sun; ChunBin Cao; Qi Cai; XuePing Song

Book ID
107356515
Publisher
SP Science China Press
Year
2010
Tongue
English
Weight
206 KB
Volume
53
Category
Article
ISSN
1006-9321

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## Abstract Thin ITO films with thickness between 0.05 and 0.4 ¡m were deposited on quartz substrates by direct‐current magnetron‐sputtering. The films' ellipsometric and transmittance spectra between 280 and 2500 nm were simulated simultaneously with a computer program based on dielectric modeling