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Study on the temperature effects of Al2O3 gate pH-ISFET

โœ Scribed by Jung-Chuan Chou; Chen-Yu Weng; Hsjian-Ming Tsai

Book ID
108469427
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
233 KB
Volume
81
Category
Article
ISSN
0925-4005

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The effects of high-temperature treatment in relatively simple gas mixtures of \(1 \% \mathrm{O}_{2} / \mathrm{N}_{2}, 1 \%\) \(\mathrm{H}_{2} / \mathrm{N}_{2}\), and an environment which alternates between these two gases on the dispersion of \(0.5 \mathrm{wt} \%\) \(\mathrm{Rh} / \mathrm{Al}_{2} \