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Study on the Hydrogenated Diamond-Like Carbon Films Synthesized by RF-PECVD from n-decane

✍ Scribed by Kroushawi, Feisal; Latifi, Hamid; Hosseini, Seyed Iman; Abbasi Firuzjah, Marzieh; Shokri, Babak

Book ID: 118802326
Publisher: Springer
Year: 2012
Tongue: English
Weight: 324 KB
Volume: 31
Category: Article
ISSN: 0164-0313
DOI: 10.1007/s10894-012-9512-x

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## Abstract Plasma enhanced chemical vapour deposition technique (PECVD) was used to grow diamond‐like carbon films using pure methane gas plasma. Structural, optical and mechanical properties of the obtained a‐C:H films were investigated as a function of bias voltage in the range 120–270 V, using