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Study on the dual frequency capacitively coupled plasmas by the particle-in-cell/Monte Carlo method

✍ Scribed by Go Wakayama, ; Nanbu, K.

Book ID: 118202123
Publisher: IEEE
Year: 2003
Tongue: English
Weight: 573 KB
Volume: 31
Category: Article
ISSN: 0093-3813
DOI: 10.1109/tps.2003.815471

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