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Study on the applications of SiC thin films to MEMS techniques through a fabrication process of cantilevers

✍ Scribed by J.-S. Hyun; J.-H. Park; J.-S. Moon; J.H. Park; S.H. Kim; Y.J. Choi; N.-E. Lee; J.-H. Boo

No coin nor oath required. For personal study only.

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