Study on optical reflection property from multilayer on Si substrate including nanoparticles in SiO2 layer

✍ Scribed by H. Tsuji; N. Arai; M. Motono; Y. Gotoh; K. Adachi; H. Kotaki; J. Ishikawa

• Book ID: 114167127
• Publisher: Elsevier Science
• Year: 2003
• Tongue: English
• Weight: 254 KB
• Volume: 206
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(03)00795-x