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Study on microstructure and semiconducting properties of doped c-BN-containing films

✍ Scribed by K.J. Liao; W.L. Wang; C.Y. Kong

Book ID
108422911
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
197 KB
Volume
141
Category
Article
ISSN
0257-8972

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## Abstract Co doped C films with different Co volume fraction __x__~v~ were fabricated using facing‐target sputtering at room temperature. The as‐deposited films are composed of ∼2 nm amorphous Co granules dispersed in a‐C matrix, and their morphology is composition independent. The graphitized ca