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Study on Microstructure and Properties of Zr-Si-N Films with Different Nitrogen Partial Pressures

✍ Scribed by Wang Jianfeng; Ma Dayan; Song Zhongxiao; Tang Wu; Xu Kewei

Publisher
Elsevier
Year
2009
Weight
164 KB
Volume
38
Category
Article
ISSN
1875-5372

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We report an investigation concerning the influence of ion bombardment on the nanostructure and physical properties of Zr-Si-N nanocomposite thin films. The films were deposited by reactive magnetron sputtering from individual Zr and Si targets. The Si content was varied by changing the power applie