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Study of X-ray lithographic conditions for SU-8 by Fourier transform infrared spectroscopy

✍ Scribed by D. Wong; T.L. Tan; P. Lee; R.S. Rawat; A. Patran

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 232 KB
Volume: 83
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2005.12.012

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