Study of the Ti/Al2O3interface

✍ Scribed by Hua Lu; C. L. Bao; D. H. Shen; X. J. Zhang; Y. D. Cui; Z. D. Lin

• Publisher: Springer
• Year: 1995
• Tongue: English
• Weight: 788 KB
• Volume: 30
• Category: Article
• ISSN: 0022-2461
• DOI: 10.1007/bf00354393

✦ Synopsis

The Ti/AI203 (1 1 0 2) interface formation has been investigated by X-ray photoelectron spectroscopy and Auger electron spectroscopy (AES). The results showed that when an active metal titanium was evaporated on to a room-temperature AI203 (1 1-0 2) surface in ultrahigh vaccum, a Ti/AI203 interface region of about 200 nm was formed, and in the first several monolayers of titanium, the titanium was oxidized due to the active oxygen anions on the surface. Therefore, the pure Ti/AI203 interface was replaced gradually by a titanium oxides/AI203 interface, which has a stronger interaction than the former. The change of shape of the photoemission lines and the shift of binding energy of aluminium, oxygen and titanium with increasing coverage of titanium showed that the formation of the Ti-0 bond at the interface is due to titanium transferring its electrons to AI 3+ via 02-anions in the AI-O bond, whereby the AI 3+ was reduced to metallic aluminium, AI ~ The AES intensity profile also proved the existence of the reduced species AI ~ This suggests that the reaction layer consists of a multiphasic mixture: the Ti-O type phase, the (Ti, AI)203 phase and metallic aluminium phase.