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Interdiffusion at the Al2O3/Ti interface studied in thin-film structures

✍ Scribed by Zalar, A.; Baretzky, B.; Dettenwanger, F.; R�hle, M.; Panjan, P.

Publisher: John Wiley and Sons
Year: 1998
Tongue: English
Weight: 319 KB
Volume: 26
Category: Article
ISSN: 0142-2421
DOI: 10.1002/(sici)1096-9918(199810)26:11<861::aid-sia443>3.0.co;2-i

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