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Study of the thermal stability of PPS films bombarded with B+ and Ar2+ ions

✍ Scribed by M.R. Rizzatti; M.A. de Araújo; R.P. Livi


Book ID
113286191
Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
477 KB
Volume
91
Category
Article
ISSN
0168-583X

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## Abstract Layer‐type van der Waals semiconductor WS~2−__x__~ films were grown by radio frequency reactive magnetron sputtering from a metallic tungsten target onto oxidized silicon substrates. The sputtering atmosphere consisted of 75% hydrogen sulfide and 25% neon, argon or xenon. The substrate