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An AES study of the reduction of anodic HfO2 by bombardment with 3 keV Ar+ ions

✍ Scribed by JM Sanz

Publisher
Elsevier Science
Year
1987
Tongue
English
Weight
223 KB
Volume
37
Category
Article
ISSN
0042-207X

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An AES study of the room-temperature oxidation of TaSix after bombardment with Ar+ ions of different energies
✍ M. Clement; J. M. Sanz; J. M. Martínez-Duart 📂 Article 📅 1990 🏛 John Wiley and Sons 🌐 English ⚖ 566 KB

## Abstract Tantalum silicide films of ∼200 nm thick and composition TaSi~2~ were obtained by co‐sputtering in a Varian 3120 S‐gun magnetron system. The films were then introduced in an AES spectrometer and bombarded with Ar^+^ ions of different energies in order to obtain surfaces of different com