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Study of the sputtered Cu atoms and Cu[sup +] ions in a hollow cathode glow discharge using a hybrid model

โœ Scribed by Baguer, N.; Bogaerts, A.


Book ID
126843514
Publisher
American Institute of Physics
Year
2005
Tongue
English
Weight
995 KB
Volume
98
Category
Article
ISSN
0021-8979

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