Role of the fast Ar atoms, Ar[sup +] ions, and metastable Ar atoms in a hollow cathode glow discharge: Study by a hybrid model

✍ Scribed by Baguer, N.; Bogaerts, A.; Gijbels, R.

• Book ID: 120065320
• Publisher: American Institute of Physics
• Year: 2003
• Tongue: English
• Weight: 899 KB
• Volume: 94
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.1594276