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Study of the reduced In2O3/μc-Si:H interface by means of factor analysis

✍ Scribed by J. M. M. de Nijs; R. G. K. M. Aarts


Book ID
104592778
Publisher
John Wiley and Sons
Year
1991
Tongue
English
Weight
699 KB
Volume
17
Category
Article
ISSN
0142-2421

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✦ Synopsis


Abstract

The overgrowth of an In~2~O~3~ layer by a μc‐Si:H layer, deposited by means of plasma‐enhanced chemical vapour deposition, will inflict the reduction of the In~2~O~3~. AES is combination with Ar^+^ depth profiling is used for the study of the interfacial deterioration that takes place. The results of a factor analysis study after reduction of the In~2~O~3~ are presented.


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