✦ LIBER ✦

Variation of the layer thickness to study the electrical property of PECVD Al2O3 / c-Si interface

✍ Scribed by Pierre Saint-Cast; Youn-Ho Heo; Etienne Billot; Peter Olwal; Marc Hofmann; Jochen Rentsch; Stefan W. Glunz; Ralf Preu

No coin nor oath required. For personal study only.

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