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Study of the interaction of plasmas with III–V semiconductor surfaces, application to passivation

✍ Scribed by P. Friedel; S. Gourrier; J.B. Theeten; D. Arnoult; M. Taillepied; M. Erman


Book ID
118361658
Publisher
Elsevier Science
Year
1986
Tongue
English
Weight
323 KB
Volume
168
Category
Article
ISSN
0039-6028

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