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Study of the interaction of plasmas with III–V semiconductor surfaces, application to passivation

✍ Scribed by P. Friedel; S. Gourrier; J.B. Theeten; D. Arnoult; M. Taillepied; M. Erman


Publisher
Elsevier Science
Year
1986
Weight
48 KB
Volume
168
Category
Article
ISSN
0167-2584

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