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Study of the cracking of highly porous p+ type silicon during drying

✍ Scribed by Belmont, O.; Bellet, D.; Bréchet, Y.


Book ID
120005610
Publisher
American Institute of Physics
Year
1996
Tongue
English
Weight
625 KB
Volume
79
Category
Article
ISSN
0021-8979

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A Young's modulus study of n- and p-type
✍ Oisten, Michael K. ;Bergstrom, Paul L. 📂 Article 📅 2009 🏛 John Wiley and Sons 🌐 English ⚖ 520 KB

## Abstract With the number of MEMS based applications utilizing porous silicon increasing, it has become more important to know the mechanical properties of the material. Using nanoindentation, the Young's modulus of various n‐type and p‐type mesoporous silicon samples has been measured. The porou