## Abstract Macropore formation and applications of lowβdoped pβtype silicon have been studied. Traditional hydrofluoric acid/ethanol/water electrolyte and organic electrolytes containing dimethyl sulfoxide and hydrofluoric acid were used, and different anodization current densities were applied in
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Optical study of porous silicon buried waveguides fabricated from p-type silicon
β Scribed by J Charrier; C Lupi; L Haji; C Boisrobert
- Publisher
- Elsevier Science
- Year
- 2000
- Tongue
- English
- Weight
- 371 KB
- Volume
- 3
- Category
- Article
- ISSN
- 1369-8001
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